The 79th JSAP Autumn Meeting 2018
Session ID : 20p-438-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 79
Location : [in Japanese]
Date : September 18, 2018 - September 21, 2018
Hydrogen plasma modification mechanism of silicon nitride surface by in-situ surface analysis
*Kazuya Nakane, Rene Henricus Jozef Vervuurt, Takayoshi Tsutsumi, Akiko Kobayashi, Nobuyoshi Kobayashi, Masaru Hori
Author information
Details
Article 1st page
