可視分光法によるHeおよびNeシートプラズマ中の中性粒子の温度測定

抄録

We measured temperatures of He neutral particle and of Ne neutral particle in sheet plasma with the visible spectroscopy. The temperature of neutral particle for Ne was not dependent on the parameters i. e. the flow rate of Ne gas and the discharge current, while the temperature of neutral particle for He was dependent on the discharge current and not dependent on the flow rate of He gas. The temperature of He neutral particle tended to increase a little with the increase of discharge current.