抄録
We are developing an electromagnetically levitated vibration isolationsystem for micro vibration isolation. It supports a floating isolationtable without any mechanical contact by using active magnetic bearings to reduce vibration from a floor. The system aims to regulate the microvibration in 6 degree of freedom. Two kinds of controller are designed and confirmed to levitate the table stably by experiments. A series of simulation show that the controllers have good effect on the vibration isolation.
