Fabrication of Ni-W Electroplated Micro Diamond Grinding Tools and Their Application to Grooving in Silicon(M^4 processes and micro-manufacturing for science (continued))
Ni-W electroplated micro diamond grinding tools with cylindrical carbide substrate having a diameter of 100μm were fabricated in ammonium citrate bath. In a fabrication of the Ni-W electroplated micro diamond tools, the effect of stirring the electroplated liquid on the abrasive grain distribution was investigated. Furthermore, the tool life in machining of the single crystalline silicon with the electroplated tools was examined.
