抄録
Recently, an ultrasonic motor using a longitudinal wave has been spotlighted as one with much higher controllability. For an ultrasonic motor tested, rectangular waves were employed as the excitation waves into piezoelectric actuators. The slider's movement was measured under several excitation conditions. The experiments suggest that it is necessary to excite the rectangular wave with certain frequencies and change parameters in order to achieve a target transport speed. The dynamic responses of the slider were simulated considering a factional force between the slider and the guide bar. Their results provide good agreement with experimental ones. Furthermore, it was demonstrated that transport direction and speed of the slider can be determined depending on phase and amplitude in vibrational speed for modes associated with frequency components of input triangular wave.
