極性により異なる入力むだ時間を含む切替系の制御系設計と空圧式除振台への応用

抄録

In the present paper, we discuss control design of switching system for a pneumatic isolation table including different time delays depending on control input polarity. The control performance of the pneumatic isolation table depends on input time delay, and the input time delay is determined by response speed of valve and pipe length. Especially, when the valve response speed and the pipe length are different between the supply side and the exhaust side, the input time delay differs depending on the input polarity. Therefore, we design the control system to switch the system to the pneumatic isolation table based on the input polarity. In the present paper, a control design is discussed and the effectiveness of the proposed method is verified by numerical simulations and experiment at results.