塔状弾性体を搭載したアクティブ除振台の上下・水平方向制振制御

抄録

This paper deals with the control system design for active isolation table that loads a dynamical object. When elastic loads are put on the isolation table, vibration modes of the table are changed. Therefore, the controllers for the active isolation table should be designed taking account of elastic loads.

In this research, an experimental active isolation table with an elastic load is built. Its dynamical model is identified by using experimental modal analysis or FEM analysis. A controller is designed to suppress horizontal and vertical vibration simultaneously. In this study, the experiment system is designed to suppress vertical vibration. Property of the improved control system is qualified through computer simulations and control experiments.