３自由度ゼロコンプライアンス機構を用いたカンチレバー式力測定装置の開発

抄録

A 3-degree-of-freedom zero-compliance mechanism is applied to a force measurement device using a cantilever. Force measurement using a cantilever has advantages of high resolution because of the low stiffness of the cantilever. However, it has a problem that the measurement conditions change because the point of force is displaced when force acts on the cantilever. To prevent such an undesired displacement, a force measurement device is fabricated in which the detection point is moved to counteract the displacement of the point of force. In this device, the force is estimated from the displacement of the detection point. The efficacy of this device is demonstrated by experiments on measuring milli-Newton-order static force.