抄録
A Piezo-electric Pump is a vibration type pump, differ from types of traditional reciprocating or rotating pumps. This pump has a simple structure, and can be enable to be downsized. So this is used in wide area such as medical, scientific or machines. But the observation on cavitation in a piezoelectric pump is not reported. In this paper, authors developed equipment for observation and analysis of cavitation phenomenon in a piezoelectric pump, using microscope, available to output to a monitor, video recorder and video printer. The cavitation of this pump was observed and considered.
