抄録
The cavitation phenomenon has been widely researched, within the extent of developing utility for hydraulic machines and applications of this phenomenon, from its discovery up to now. The piezoelectric pump has a vibrating system, differing from the types of traditional volumetric reciprocating or rotating pump. Though cavitation has been utilized in wide region, it is not investigated precisely in piezoelectric pump. In this paper, authors showed the structure and the principle of this pump. Then factors of cavitation phenomena by experiment, such as appearance features, center-occurrence tendency and indestructibility of cavitation, are discussed.