抄録
Quartz glass high aspect ratio hole by drilling. In the case of the machining of quartz glass, a chipping is occurred caused by the machining stress due to its high hardness and brittleness. On the other hand, electrical discharge machining has a small machining stress. Therefore, in this study, a micro hole machining of the quartz glass was carried. The effect of capacitance of RC discharge circuit was investigated and a high aspect ratio micro hole machining was tried. In this study, an RC discharge circuit was used for machining. The quartz glass was machined using an assisting electrode method, because of its high insulating properties. An Assisting electrode was adhered on the workpiece surface, and the discharge was occurred to the surface. An electrical conductive layer was formed by the thermal decomposition carbon derived from the work oil. A power supply path was formed on the electrical discharge machined surface, and the machining was continued. The removal rate was increased with a decrease in capacitance. And the electrode wear ratio was indicated low in each capacitance. The micro hole drilling of high aspect ratio was carried out by capacitance of 1.1 nF. In this machining, removal rate was decreased as the high machined hole depth.
