抄録
A beam-shaped cantilever-based magnetic sensor has been proposed with a micro magnet, expected to be applicable to terrestrial magnetism with a very higher sensitivity. Three structural designs, named as model 1, model 2 and model 3, have been comparatively conducted using ANSYS in order to obtain larger frequency shifts due to the applied exterior magnetic filed. The preliminary analytical results show that, in the range of 0 〜 10 mT, the frequency shifts are small, while under 100 mT, a relatively larger frequency shift of about 30 Hz can be theoretically obtained.