茨城講演会講演論文集
Online ISSN : 2424-2683
ISSN-L : 2424-2683
セッションID: 803
会議情報
803 マイクロマグネットを用いた磁気センサデバイスの研究開発(OS8-(1)オーガナイズドセッション《マイクロマシンとG-MEMS/N-MEMS》)
寺澤 大介王 東方小林 健前田 龍太郎
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会議録・要旨集 フリー

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A beam-shaped cantilever-based magnetic sensor has been proposed with a micro magnet, expected to be applicable to terrestrial magnetism with a very higher sensitivity. Three structural designs, named as model 1, model 2 and model 3, have been comparatively conducted using ANSYS in order to obtain larger frequency shifts due to the applied exterior magnetic filed. The preliminary analytical results show that, in the range of 0 〜 10 mT, the frequency shifts are small, while under 100 mT, a relatively larger frequency shift of about 30 Hz can be theoretically obtained.
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© 2011 一般社団法人 日本機械学会
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