抄録
Vibration amplitude of a cantilever used in an atomic force microscope (AFM) measured by using the optical lever method may include errors and correction of the amplitude depending on the vibration frequency is necessary. Therefore, the correction factors for vibration amplitude of the cantilever with an added mass, spring and damping at an end were derived theoretically. These correction factors are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.
