抄録
When designing a controller of the ball-screw-driven stage,the frequency characteristic of the stage is generally measured with an actual equipment.Thus,the positioning performance of the stage can't be estimated at planning phase.In this study,we proposed a modeling method of the frequency characteristic of the ball-screw-driven stage.In ball-screw-driven stage,not only the stiffness of the screw shaft but mode of vibration of structure affect the frequency characteristic.The proposed method consists of a lumped parameter model of the ball screw driving system and vibration models of structure,and the effectiveness of the proposed model is determined in comparison with experimental results.
