静電力と弾性力によるすきま制御機構を付与した摩擦力顕微鏡プローブの開発

抄録

Friction force microscopes (FFMs) are widely used for measuring lubrication properties on the nanometer scale. In measurement of lubrication in nanometer gaps, control of the gap between the sliding probe and the sample surface is essential since lubrication properties significantly depends on the size of the gap. In this report, with the aim of realizing FFMs capable of accurate control of sliding gap, we tried to develop a probe with an actuator that utilizes electrostatic and elastic forces.