６自由度磁気浮上ステージによる微細切削加工

抄録

This study proposes a method of measurement and control in micro cutting process with rotary cutting tools of 30-100μm in diameter using a electromagnetically levitated stage. Because the magnetic levitation can support a stage with work by non-contact, disturbance such as frictional force does not occur and it can measure force produced by micro cutting. Furthermore, the force applied to the cutting tool can be controlled by adjusting the position of the stage depending on the measured force. In this study, an experiment of measurement of the force in micro cutting process using tool of 30μm in diameter are reported.