水晶振動子センサとガラス球プローブを用いたナノすきま潤滑の垂直力・せん断力同時計測法の高精度化

抄録

A new type of sliding probe for clarifying nano-lubrication phenomena was proposed. In the probe, a small glass sphere was attached with a micro structure for lateral force detection, while a quartz oscillator was used for normal force detection. Although feasibility was demonstrated, repeatability and sensitivity of normal force detection were low. In this study, the repeatability and sensitivity were improved.