関西支部講演会講演論文集
Online ISSN : 2424-2756
会議情報
307 Si ツールによる微小量切削加工
浅井 邦彦矢野 章成樋口 誠宏山口 智実
著者情報
会議録・要旨集 フリー

p. _3-13_-_3-14_

詳細
抄録
Possibility of the micro cutting by Si tool that is formed by the anisotropic etching of silicon wafer is discussed. The ultrasonic cutting of flint glasses was carried out with the Si tool made on an experimental basis. As a result, it was found that the surface roughness decreases and the tool wear increases with the increase in cutting time. Therefore, it was confirmed that the Si tool has a cutting ability.
著者関連情報
© 2002 一般社団法人 日本機械学会
前の記事 次の記事
feedback
Top