斜め蒸着法によるナノポーラス薄膜の作製とそのクリープ特性

抄録

Metallic nano-film has effects of film thickness on the creep properties: the steady-state creep rate decreases as thickness decreases in 200-100 nm thickness range. Therefore, nanoporous film that consist of nano-elements with the dimensions of less than 100 nm would show high resistance to creep deformation owing to thickness effects on nano-elements. In this study, we compared the creep properties of nanoporous films, that were fabricated by glancing angle deposition (GLAD), with those of solid films. Nanoporous films showed roughly the same creep properties as solid films.