21716 可視域レーザ光の高吸収、高断熱固体壁創製に関する研究(薄膜・計測,OS.12 機械工学が支援する微細加工技術(半導体・MEMS・NEMS))

抄録

Varying some types of substrate structure, we measured temperature difference near the Ar^+ laser spot (Φ1[mm]) between front surface on which sputtered carbon film was fabricated and rear surface by thermocouple to compare thermal insulation properties. The point we measured was about 2mm far from laser spot and the diameter of thermocouple is 1.3[μm]. It was cleared that we can gain remarkable insulation effect by inserting air layer between front and rear substrate. Maximum temperature difference on 3-layer substrate (top layer: Glass, second layer: Air, third layer: Polyimide, total: 0.558[mm]) was about 4 times increased than single-layer substrate (top layer: Glass, total: 0.152[mm]). Especially, we could find that effect in average expansion speed of temperature difference (0-1[s])