抄録
Bio-calorimeter using the micro-electro-mechanical systems(MEMS) sensors is able to monitor biological activity of a small number of cells through measuring metabolic heat. We have developed a bio-calorimeter which can detect heat generation to a few tens nano-watt. It composed of two Ni-Cr thermopile sensors, a five-fold thermostat chamber, and analog amplifier circuits. In this research, its performance and metabolism monitoring of Yeast or Yogult lactobacillus were tested. Then, the sensitivity of the sensor was calibrated with a heating rate at center Cr heater and thermopile output voltage. As a result, it evaluated the sensitivity of 2V/W with a sample cell, the settling time of 2.5 hours, and a noise equivalent power of 10 nW. And also, growth thermogram of Yogult lactobacillus shown a detection limit to 20 nW.