ウェーハ洗浄時を模擬した液膜流れに衝突する液滴挙動に関する研究

抄録

Droplet collision to the liquid film flow was observed experimentally. Liquid film flow was formed on the acrylic plate. Droplet with black ink was dropped on the liquid film flow. Height of droplet from the liquid film changed from 0mm to 100mm. A high-speed video camera was placed under the acrylic plate to record the adhesion behavior of the droplet. The moving distance of the black ink was measured from the image taken by the high-speed video camera. As a result, it was confirmed that migration velocity of the black ink part become low when the dropping height becomes high. The penetration depth into the liquid film were calculated by the boundary layer flow model. Results showed that the penetration depth reached to the position of several micro-meters from the acrylic bottom plate.