抄録
In this article, the stabilization technique for the positioning control with atomic resolution of the scanning tunneling microscope tip by referring atomic point and array on regular crystalline surface is discussed. To optimize and improve the performance of the tracking controller against the disturbance, the frequency response of the tracking system is experimentally determined. A controller consists of two control parts is proposed for the stabilization. Each of them is designed for compensating for the low frequency of the thermal deformation and floor vibration, and the high frequency of the acoustic, respectively. A scanning tunneling microscope with two tube type scanners, in which one is for introducing an artificial disturbance and the other is for atomic tracking, is used for experimental determination of the performance test of the proposed controller. The experimental results show that the proposed controller has high stability against the disturbance and can be used to atomic tracking control.
