抄録
Functional surface generation by periodic regular structures such as arrays of dots, lines (short and long) at ultra precision level on hard brittle materials finds applications in optical, electrical and semiconductor applications. This paper reports on development of nano formed surfaces on hard brittle materials. Textured surfaces by periodic structures were fabricated on soda glass, firelite glass and silicon. Specially designed and developed nano indentation tester, knife edged and nano structured diamond indenters were used for the generation of such surfaces. Load-depth analysis on the formed surfaces was carried out. Critical depth, at which ductile to brittle transition in deformation occurs, was assessed for the hard brittle materials. Limit of ductile mode indentation for hard brittle materials was discussed in detail.
