抄録
Ultraprecision optical components require ultrafine smooth surface quality of sub-nanometer or sub-angstrom in Ra. To achieve these requirements, ultraprecision on-machine measuring system is very important, by which the profile measurement and evaluation is conducted on the machine, the form accuracy is improved by the compensating machining when the form accuracy is not enough. So, in this paper, ultraprecision on-machine measuring system with laser-probe was developed for measurement with high-accuracy and high-efficiency. The resolution of the auto focus unit is 1nm, the measuring range is 10mm and the repeatability is 5.6nm. The possibility of the on-machine surface roughness and form measurement with laser-probe was confirmed.
