抄録
The combination of single crystal diamond tool and friction-free ultraprecision machining center was employed to turn diffraction Fresnel lens which is composed of micrometer-level pitch and depth of microgrooves. It is found that the technology proposed in the study has a great potential of manufacturing of circular form microgrooves to realize a high dimensional accuracy of diffraction Fresnel lens. According to results of machining experiments, the surface roughness of machined microgroove on diffraction Fresnel lens was approximately 2nm with sharp ridgeline and groove bottom. Especially when the high speed air turbine spindle was applied to ultraprecision turning conducted at 20,000rpm, the dimensional accuracy is less than 0.1μm.
