抄録
This paper describes a new hybrid technique, which combines wire electro discharge grinding (WEDG) technology with one pulse electro discharge, for fabricating micro spherical and micro sharp probes. This new procedure is not only able to machine micro spherical probes but also sharp probes with cathode polarity of the electrode. A burnished spherical probe with diameter of about 40μm could be formed instantaneously with this hybrid technology. The greater the peak current of the one pulse electro discharge, the larger the spherical probes that can be machined. The experimental results also showed that a micro sharp probe with tip curvature of about 150nm was fabricated successfully with cathode polarity. It is expected that there are more applications in micro die machining and biotechnology in the future.
