Ion Beam Figuring (IBF) Solutions for High Performance Optics Surface Finishing from Meter to Millimeter Spatial Wavelength Range(Advances in non-traditional machining)

抄録

Ion beam etching becomes more and more established in high precision surface processing for advanced optical, electronic and mechanical products. In optics fabrication IBF is able to overcome physical constraints of the conventional full lap and small tool abrasive polishing processes. This together with an accurate control of the removal rate results in an efficient correction of long spatial wavelength errors with almost no or minimum surface or subsurface damage, respectively due to the gentle beam surface interaction.