抄録
In this paper, we proposed a complex finishing process of MRF and ELID grinding and applied this method to nano-precision finishing for glass lens. ELID grinding, as pre-finishing, was employed to obtain high form accuracy and good surface quality in high efficiency. And then, MRF, as the final finishing, was used for improve furthermore surface quality and figure accuracy. Several sets of finishing experiments for sphere glass lens have been performed to verify obtainable surface figure precision and surface finish by use of this new synergistic process. Surface accuracy of the λ/18 nm P-V and surface micro-roughness less than 10 Angstroms for spherical lens were produced in high efficiency.
