抄録
In this paper, we proposed a complex finishing process of MRF and ELID grinding and applied this method to nano-precision finishing of silicon mirrors. ELID grinding, as the pre-finishing, was employed to obtain high efficiency and form accuracy, and then, MRF, as the final finishing, was used to improve furthermore surface quality and figure accuracy. Several sets of finishing experiments for silicon mirrors have been performed to verify obtainable surface figure precision and surface roughness by use of this new synergistic process. Surface accuracy of the 0.333μm peak-to-valley and surface micro-roughness less than 10 Angstrom for silicon mirror were produced in high efficiency.
