Nano Forming Process for Functional Surface(M^4 processes and micro-manufacturing for science)

抄録

This paper reports on nano surface fabrication of hard-brittle materials by direct imprinting method. Ultra fine structured surfaces were fabricated on soda glass. Specially designed nano indentation tester is used for the experiment. Various structured tools are developed. Imprinted mark and the ultra fine structured are analyzed for geometrical shape and processing characteristics. Also, new functional surfaces about friction properties developed by the nano fabrication process are studied.