抄録
It is difficult to polish micro-aspherical molding dies because it is difficult to gather the abrasive grains effectively in a small polishing area. In this study, an electrorheological (ER) fluid assisted polishing method is proposed, in which the workpiece and the micro-tool are used as electrodes in order to gather the abrasive grains around the interface thereof. The relationship between polishing performance and the gap between the two electrodes is investigated and the force acting on the abrasive grains was calculated by FEM. Furthermore, a resin coated polishing tool is developed which prevents the workpiece from being scratched when in contact with the polishing tool.
