抄録
Additional inertial force will cause the deformation of some parts when 3D-coordinate Measuring Machine (CMM) runs quickly. It will result in the difference between real results and reading of raster sensor, that is, dynamic error will be produced. This paper presents the theoretical model of CMM dynamic error compensation. The Z-direction deformation of crossbeam is analyzed based on Ansys, one kind of finite element simulation software, when slide carriage is in different position under three different load conditions (accelerating, uniform speed, decelerating). Dynamic error compensation model is acquired under any kind of load according to the analysis results, which can improve the measuring accuracy of CMM greatly.
