Grooving Performances of Developed Micro Diamond Grinding Tool by Electroless Composite Plating on Hard and Brittle Materials

Ahmad SHARIFUDDIN; Hiromichi ONIKURA; Osamu OHNISHI; Heung-Kil PARK

doi:10.1299/jsmelem.2007.4.7E502

2007.4

セッションID: 7E502

DOI https://doi.org/10.1299/jsmelem.2007.4.7E502

会議情報

主催: The Japan Society of Mechanical Engineers

会議名: 第4回 21世紀における先端生産工学・技術に関する国際会議 (LEM21)

開催日: 2007/11/07 - 2007/11/09

Grooving Performances of Developed Micro Diamond Grinding Tool by Electroless Composite Plating on Hard and Brittle Materials

*Ahmad SHARIFUDDIN, Hiromichi ONIKURA, Osamu OHNISHI, Heung-Kil PARK

著者情報

キーワード: Micro grinding tool, Electroless nickel, Diamond, Micro grooving, Feed rate, Grinding speed

会議録・要旨集フリー

詳細

抄録

The grooving performances of fabricated micro diamond grinding tool with a diameter of 115 μm on hard and brittle materials were studied. Micro diamond with grit size of 2 to 4 μm was used to fabricate the grinding tool by electroless nickel-phosphorus (Ni-P) composite plating. Here, by using the fabricated tools we try to investigate the machinability in grooving of each workpiece; single crystalline silicon and quartz glass in the aspect of feed rate and grinding speed to the tool life.

責任著者(Corresponding author)

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