A Novel Touch Probe Triggered by Harmonic Generation

抄録

A new type of touch probe for measuring small optical parts is proposed. The probe is excited by a piezoelectric actuator in sinusoidal waveform. When the probe touches an object, harmonic components of the excitation appear in the power spectrum of the probe vibration. It is judged that the probe touches the object at the power of the second harmonic exceeds a threshold level. The touch probe is mounted on a small CMM and evaluated its performance by measuring standard steel balls.