抄録
This paper proposes a mathematical model of a feed drive system consisting of a rod type linear motor and linear ball guides. The mathematical model of the feed drive system consists of vibration model and friction model. The vibration model has three degrees of freedom; vibrations of a rod, a table, and a base. The friction model is consisting of two components; a model for the relationships between displacement and friction force under micro-scopic motion (non-linear spring characteristic), and a model of the relationship between velocity and friction force. In older to evaluate the proposed model, step responses and circular motion under various conditions were measured and simulated. As the results, it was confirmed that the proposed model can express the actual behaviors accurately.