Effect of ELID Grinding on Conductive Rubber-Bond Wheel

抄録

We developed a conductive rubber-bond grinding wheel for ELID grinding. The grinding wheel is composed of rubber, carbon, and abrasives, and was designed to demonstrate ELID effects (continuous grinding ability) by the excellent finishing effects of rubber and conductivity ensured by carbon. The prototyped grinding wheel was a #1200 conductive rubber-bond grinding wheel using Al₂O₃ abrasives. Grinding experiments of mono-crystalline silicon were carried out using this grinding wheel, and it was found that stable grinding without loading could be realized by adding ELID grinding.