Prototype of Membrane Driven Micro-Pump and its Performance

抄録

Principle of membrane driven micro-pump was clarified in the previous paper[1], and its fundamental performance has been tested in the current paper. Namely, micro flow rate was measured by PIV (Particle Image Velocimetry) against a membrane displacement that is measured by a laser displacement gauge. The flow rate calculated from the membrane displacements resulted in about 1000 nl/min, on the other hand, the measured one scattered widely centered 300 nl/min. This difference may come from a bubble growth and diffusing process, nevertheless, the prototype seems applicable to a pumping system for μ-TAS, micro-fuel cell, etc.