Micro Incremental Forming of Thin Films

抄録

This paper describes micro incremental forming of thin films. A desk-top type of CNC milling machine with motion resolutions less than 0.1 micrometers was used to form three kinds of thin films in this study. A tool for forming is a bar with a round tip. It was found that the rotation of a tool up to 10000 rpm promotes the local plastic deformation near the tool-film contact area and improves the forming limit of thin films. It was also found that the optimum axial feed is around the thickness of the workpiece. Finally, incremental forming of a thin aluminum film 0.8 micrometers thick was conducted successfully under optimized conditions.