抄録
Unsteady heat conduction analysis was carried out in order to clarify the surface temperature of workpiece in the EB polishing process. In the analysis model, the electron beam penetration into the workpiece surface and the material structure for cemented tungsten carbide were considered. The temperature changes of surface layer for ceramics, cemented carbide, and stainless steel were analyzed. Moreover, the analyzed results were verified with experimental results, such as observations of the EB polished surfaces. The FEM model built in this study could precisely predict the temperature changes for each material in EB polishing.
