抄録
Roller nano imprint (RNI) process is expected as a key technology that realizes a cheap and high through-put nano fabrication process. RNI is a kind of a rolling process that replicates nano structures of a mold to a work material. Development of nano structure mold is therefore essential for development of RNI technology. In this paper, development of a nano-structure foil mold made of TiN and Ni is reported. The foil mold is applied for the RNI experiments. It is shown that RNI modifies optical reflectance of work material. Application of RNI to nano dot array fabrication is studied also.
