抄録
This paper presents a new measurement system for on-machine form measurement of surface edges. The system is composed of a laser displacement sensor and a cantilever, on which a mechanical stylus probe would be mounted. The displacement of the cantilever probe is measured by a laser displacement sensor. Tip radius of the stylus probe is smaller than the diameter of the laser spot and the cantilever is fabricated with a material with a low spring constant. The proposed system satisfies both the large measurement range and low measurement force, while it can be applied to on-machine measurements.
