抄録
This paper proposes a method of improving the sensitivity of the angle sensor for angular motion errors of precision linear stages. The sensitivity of the angle sensor based on laser autocollimation depends on the diameter of the incident beam on the objective lens. The relationship between the sensitivity of the sensor and the beam diameter is investigated by expanding the diameter and using a single-cell photodiode as the position-sensing detector corresponding to a small light spot. From the experimental result, the sensitivity is improved by expanding the diameter and the sensor can detect angular motion of about 0.001".
