抄録
A surface encoder, which can measure the XYZ-directional displacements, has been developed. The XY-directional measurement range depends on the size of the XY-axis scale grating. A mosaic XY-axis scale grating, which consists of multiple XY-axis grating, has been proposed to expand the XY-directional measurement range of the three-axis surface encoder. And multi-probe surface encoder, which has two-probe, for the mosaic scale grating has been proposed. In this paper, an optical sensor head, which has four-probe for the mosaic XY-axis scale grating, was developed and basic experiment was carried out to confirm the feasibility of the proposed method.
