抄録
The water driven stage was developed as a feed table for ultra-precision machine tool. The motion accuracy of the feed table is quite important in the ultra-precision machining. The paper thus deals with the attitude control of the table of the water driven stage. In particular, the paper focuses on the pitching control of the table. Trial pitching control tests of the water driven stage are carried out based on the pressure control of the water hydrostatic bearings of the stage. The feedback pitching control system for the water driven stage is then designed based on the approximated transfer function of the stage and flow control valve. The static and dynamic characteristics of the designed feedback control system are investigated via experiments.
