抄録
ECM is effective method for hard materials. However, such as titanium, passivity occurs and machining stops immediately. Electrochemical mechanical polishing (ECMP) is effective for materials that easily become passivated. In this paper, the machining characteristics of difficult-to-machine materials with Electrochemical Mechanical Polishing (ECMP) are investigated. From the result of ECMP with various applied voltages, optimum machining voltages to improve surface roughness exist for each material. We attempted to generate complex shape with Electrochemical Grinding (ECG) using small polisher. From the result, machining shape could be created by controlled scanning speed.
