抄録
Structured optical elements such as Fresnel lenses made of glass or polymers are commonly replicated by hot pressing and/or injection molding using high precision molds with 3D-structured surface like V-grooves. In the fabrication of molds, nano-precision polishing is essential as the final process. In this study, a novel polishing method using magnetic compound fluid (MCF) slurry is proposed. The effects of process parameters including MCF slurry supplying amount, workpiece oscillation parameter and MCF carrier rotational speed on work-surface roughness and form error were experimentally investigated. As a result, nano-precision surface finish of structured surface was successfully attained by polishing with MCF slurry.
