抄録
The authors propose a new efficient fabrication process by the templated thermal dewetting method in this paper. This process comprises 4 steps. Firstly, sputter etching on a quartz glass substrate. Secondly, line and space pattern of micrometer size is printed with acetone on the substrate by means of stamping with a polymer film stamp. Thirdly, an Au film is deposited on the substrate. Finally, the substrate is annealed. It is revealed that the line and space pattern stamped with acetone on the substrate works as a template of the thermal dewetting process. Nano chemical stamping technique is useful to control the distribution of nanodots size.
