抄録
A new nano manufacturing method to fabricate minute metal resonators on a quartz glass substrate is reported in this paper. Minute metal resonators are useful for development of optical metamaterials. In this paper, double layer nano-rod resonators are fabricated by utilizing templated thermal dewetting method. The proposed fabrication process separate into two phases; the first process is the fabrication process of a single layer nano-rod array on a quartz glass substrate, and the second process is the fabrication process of a double layer nano-rod array. Through the experiments, effects of process conditions are investigated and optical extinction spectrum of the fabricated double layer nano-rod array is evaluated.
