Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2017.9
セッションID: 076
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Ultra-precision angle sensor with a mode-locked laser source
Shuhei MADOKOROYuki SHIMIZUYuan-Liu CHENWei GAO
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This paper presents a new optical angle sensor, in which a mode-locked laser referred to as an optical frequency comb is employed as the light source. Highly-stable carrier frequency of the optical frequency comb is expected to improve the sensor stability. This angle sensor is designed based on laser autocollimation method, and utilizes the chromatic dispersion of an objective lens to detect angular displacement of a measurement target. A detail of the proposed method is described, followed by some experimental results with the developed prototype optical sensor.

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© 2017 The Japan Society of Mechanical Engineers
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